Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : November 02, 2019 - November 04, 2019
Polycrystalline ceramics has been used in wide range of fields these days. For example, poly-silicon has been used for solar panel and improved the performance. Therefore, crystal orientation imaging in the region of interest is very important to increase the performance and the reliabillity. Micro-Raman spectroscopy can measure quantitativelly crystal orientation of single crystalline silicon and allumina by controling polarization. However, a lot of time and efforts are required in order to get a two-dimensional Raman image. In this study, we developed a two-dimensional micro-Raman spectroscope combine with direct Raman imaging system. This system can obtain directly the two-dimentional Raman signal image of targeted material and get the Raman data cube that consists of the measuring position(x,y) in mearsurment region at one time. Detection system consists of Micro lens array(MLA), optical fiber bundle(FB) and spectometer and 2D-CCD. MLA split two-dimensinal Raman scattering into mulipoints and focuses on BF. Then, the two-dimensional images can be obtained without scanning exitation laser and stages by dispering Raman scattered light after dimensinal array transformation of detection coordinates by BF. We aim to evaluate grain boundaries of poly-Si and poly-Al2O3. This system is expected to contribute toward grasping distribution of grain boundary efficientlly in two-dimensinal region.
