X線プロファイル解析に基づくナノ結晶ニッケル薄膜の機械的特性に及ぼす焼鈍の影響に関する検討

抄録

Four types of test specimens of nanocrystalline nickel thin films were prepared: As-deposited material without annealing, and specimens annealed at 473K, 523K, and 573K, respectively. Tensile and fatigue tests were conducted on each specimen, and stress-strain curves and S-N diagrams were created. The effect of annealing on the mechanical properties was investigated based on the difference in crystal structure analyzed from profiles obtained from synchrotron radiation X-rays.