Performance Evaluation of MEMS Strain Gauge by Finite Element Method

Abstract

When using strain gauges, the time resolution limits the measurement to only a few hundred kHz. Unfortunately, this time resolution is insufficient for capturing high-speed phenomena above several MHz. In this study, our focus was on the gauge length and material constants that can effectively improve time resolution. We aimed to develop a MEMS strain gauge with enhanced temporal and spatial resolution by reducing the gauge length to approximately 1/10 of conventional gauges. Through numerical analysis, we confirmed that utilizing different material constants at the base can reduce the disparities in strain history by loosening the constraints on the elements near the base. Additionally, varying the thickness of the base can also decrease discrepancies in strain history by decreasing the constraints on the elements near the base. These results provide clarity on the influence of the base on both the gauge and the specimen.