Abstract
Generally, micro parts in MEMS field are fabricated by silicon-based micro-machining method. On the other hand, precise machining method by a mechanical machine with nano-meter accuracy is getting attention in some field these days. This method has several advantages as it can produce exact and clear slope which will have free shape some time and several kind of materials with high quality. But so far, it has been acknowledged that the mechanical machining is not suitable for high aspect ratio micro structuring, such as micro square groove. Because, making micro tool is too difficult and machine vibrations cause bad infurance. In this paper, we report about it is possible to manufacture with ultra-precision by means of mechanical machining high aspect ratio micro structure which took up the micro square groove and the micro square pillar.
