CVD-SiC mirror of Ultraprecision Grinding with ELID : electrolytic in-process dressing

Abstract

This paper describes the grinding of CVD-SiC X-ray mirrors with cylindrical surfaces using an ultraprecision micro-form generating machine with ELID system. The grinding wheels used were trued to a R-shape with high profile accuracy by a micro EDM truing device mounted on the machine. Results of grinding experiments indicated that a good form accuracy was achieved successfully.