抄録
Future flexible manufacturing systems require intelligent machine tools equipped with effective in-process monitoring systems for machining environment. To meet the requirements, the sensor which has properties such as multifunctionality, reliability, sensitiveness, responsibility, and compactness, is urgently required. Therefore, we developed a micro-sensor of resistance thermometry type which can detect thermal behaviour near by cutting point with high responsibility. The proposed sensor is made by-micro-fabrication technique for semiconductor product and onto tool tip surface directly. In this study, the performances of the proposed micro-sensor have been verified through a series of actual cutting experiments.
