抄録
A new ultrasonic elliptical vibration grinding method utilizing a stator of an ultrasonic motor is proposed. The ultrasonic elliptical vibration grinding wheel is produced by plating diamond grits on the stator of an ultrasonic motor. The basic characteristics of constant pressure grinding and constant depth of cut grinding for monocrystalline silicon are investigated with the proposed wheel. The result was that 8 times stock removal rate was obtained in constant pressure grinding by giving elliptical vibration and that normal grinding force decreased by 50% in constant depth of cut grinding. The effect of elliptical vibration was remarkable in case of rather low wheel peripheral speed as 10m/min and low grinding pressure as 15kPa.
