抄録
This paper describes Servo Technology for 'High Speed and High Precision Machining'. From the market, feed axis of machine tool is required to realize high speed feed, maintaining high accuracy. In order to meet this request, FANUC has introduced the concept 'NANO CMC', which enables ultra high speed and high precision. This NANO CNC system consists of Nano meter unit Interpolation by CNC and Nano meter level Control by newly designed servo system, called αi series. Nano control is constructed by organic combination of servo motor with ultra smooth rotation, encoder with super high resolution, amplifier with high precision current detector and control software with high response and high precision.
