抄録
There is physically and chemistry with the fact, when processing factor of loose abrasive polishing is greatly divided. In the polishing using the ultrafine particle, the chemical effect seems to be big, since it has the characteristics, which are easy to adsorb ions, because surface energy is largely surface activity on the small particle. Then, the effect of the polishing condition was grasped by measuring voltage value and current value in the polishing, and the possibility of adaptive control polishing which made current value and voltage value to be a standard was examined. As the result, the voltage value seemed to change by the friction of the polishing, and it was proven that the current value affected chemical reaction.
