Abstract
This project aims to develop a micromanipulation system, which enables unskilled operators to implement in-situ operations to a tiny object at an environment of Scanning Electron Microscope (SEM). The current research has developed an image-processing algorithm to real time capture the movements of the tool tip, to translate the movements to the hypothetical magnification and then to adaptively control the movements of manipulator accordingly. This paper has described the visual feedback algorithm and force feedback device to enhance the operation ability of the system.
