312 マイクロ研削のためのミリ加工機の開発 : Siマイクロピラミッドを工具とする基本構造(OS6 マイクロ加工(1))

西澤 啓之; 山口 智実; 樋口 誠宏; 矢野 章成; 島田 尚一

doi:10.1299/jsmemmt.2001.3.89

The Proceedings of The Manufacturing & Machine Tool Conference

Online ISSN : 2424-3094

2001.3

Session ID : 312

DOI https://doi.org/10.1299/jsmemmt.2001.3.89

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312 Development of Milli-machine for Super Finishing : Fundamental Structure with Micro Pyramids of Si

Hiroyuki NISHIZAWA, Tomomi YAMAGUCHI, Masahiro HIGUCHI, Akishige YANO, Shoichi SHIMADA

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Keywords: milli-machine, micro pyramids, silicon wafer, etching, magnetic force, surface contact

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

Development of milli-machine for super finishing is discussed in this paper. The micro tool which is formed by anisotropic etching of silicon wafer is attached to the milli-machine. The milli-machine is driven by the repulsion of magnetic force. It is found that the developed milli-machine has the cutting ability of the Al-Mg alloy material.

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