418 ナノメータ切削加工機用パラレル機構の開発

抄録

This report deals with a nanometer-cutting machine using Stewart platform type parallel mechanism. The movable range of the prototype is 20 μm in the x- and y- directions and 100 μm in the z- direction. The resonant frequency of the prototype is approximately 85 Hz in all directions. The stage motion was controlled by the displacement feedback control of the link length. The standard deviation of motion error was 0.1 μm after the calibration. This stage was applied to a positioning device of the nanometer-cutting machine. Pockets could be machined on acrylic resin with a vibration of the probe tip.