抄録
The influence of grinding fluid on ductile-mode ultra-smoothness grinding of fine ceramics using #140 coarse diamond grinding wheel is examined. The effect of grinding fluid on the ductile-mode ultra-smoothness grinding is ascertained. The effect for Al_2O_3-TiC ceramic is larger than silicon carbide. The ultra-smoothness surface below 40nm(Ry) or 5nm(Ra) in 3D measuring area of 256μm is attained.
