Abstract
This paper presents a super wide range surface form measurement method based on a stitching technique of the data of precision optical microscopes. This method intends to multiscale measurement of precision element surface, especially super precision machining part which tends to have white spectrum of surface profile. In this paper the precision die form is expected to measure three dimensionally from micro asperity profile to precise form profile continuously. In these applications some stitching techniques like plane surface, cylindrical surface, connection in height direction and that in angular direction, are proposed and presented.
