Abstract
Vacuum chucks are usually used in ultra-precision turning of thin plates like magnetic aluminum discs, for which high machining accuracy is absolutely important. Especially, high form accuracy of machined discs can be expected of porous vacuum chucks because they are superior on uniformity of supporting rigidity to other types of vacuum chucks. Consequently, final purpose of this study is to develop a new porous vacuum chuck suitable for ultra-precision turning of thin plates. As a first step, the new porous vacuum chuck was designed with reference to previous studies, and was made on an experimental basis. Furthermore, important functions of porous sintered fluororesin adopted as holder material were investigated. As a result, it was demonstrated that the chuck made from porous sintered fluororesin had holding forces enough to machine discs and deformation of discs when mounting them could be smaller than other chuck made from the porous sintered ceramics or metals because modulus of elasticity of porous sintered fluororesin is fairly smaller than the other porous materials.
