205 ELID+MRFナノプレシジョン加工(OS6 超精密加工)

抄録

Study on attempts to develop novel fine fabrication processes combined with ELID is being conducted. In this paper, examples on novel combined/ hybrid processing for high-quality and micro-level fabrication are introduced, and a new finishing method called magnetorheological finishing (MRF) of ELID grinding surface is introduced.