The Proceedings of The Manufacturing & Machine Tool Conference
Online ISSN : 2424-3094
2006.6
Session ID : 227
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227 Development of Stand Alone Nano Machining and Measuring System for Nano Factory
Kiyonori INAGAKI, Noboru MORITA, Noboru TAKANO, Jyunji SAITOU, Mineo MIZUMURA, Kazutaka KANDA, Kiwamu ASHIDA, Tsutomu OBATA, Yoshinori FUNADA
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Keywords: Diamond AFM Cantilever, Diamond Array Tool, Precision Machining, Nano Machining
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Abstract
In this study, we developed precision processing equipment that has processing mechanism by a shaper system and a milling system. Precision processing mechanism by a shaper system has an edge of a CVD diamond on the tip of a cantilever for frictional force microscopes (FFM). And precision milling mechanism has an edge of a pyramidal CVD diamond on the tip of a spindle. This equipment can do processing and the measurement in ranges from nanometers to micrometers. This report will introduce about the concept and mechanism of this equipment.
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© 2006 The Japan Society of Mechanical Engineers
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