抄録
This paper discusses 3D micro machining technology which can realize the micro channel with variable depth and width on glass plates. Etching process can not make 3D shape of groove. Therefore we carried out the basic study on the 3D cutting of glass with micro ball end mill. Concretely, property of the machined 3D channel was evaluated experimentally. Cutting force in descent direction is heavier than rising direction. Compared with DLC and diamond coating tool after cutting, diamond coating tool is better than DLC that in wear of tool. Moreover in observation of the 3D machined surface, better surface can be obtained when tilt angle of spindle is 45°
