抄録
Optical components with micro groove structures like diffraction gratings, light guide plates or holographic optical elements require extremery high form accuracy and ultra-fine smooth surface quality of sub-nanometer or sub-angstrom in Ra. To achieve these requirements, ultaprecision on-machine measurement system in very important, by which the profile measurement and evaluation is conducted on the machine, the form accuracy by the compensating machining when the form accuracy in not enough. So, on-machine profile measuring system with non-contact laser type probe has been developed.
