抄録
Thick films are needed in micro-electro-mechanical systems as insulation, piezoelectric and ferroelectric materials. To form the thick film, Powder Jet Deposition (PJD) method has been proposed. In the PJD process, particles are sprayed on the substrate under the condition of room temperature and atmospheric pressure. We have developed a new jet mechanism of double-nozzle type, and reported its results previously. In this study, we optimized the shape of the nozzle through investigate the influence of different dimensions and shape of the nozzle on the particle blasting velocity. As a result, it is found that nozzle diameter has a large affect on the particle velocity
