抄録
Hybrid micro-machining is the most promising technology for the production of miniaturized parts and this technology is becoming more and more important and popular because of growing demand for industrial products with not only increased number of functions but also of reduced dimensions, higher dimensional accuracy and better surface finish. In order to achieve meaningful implementation of micro-machining techniques, this research seeks to address four important areas; namely (a) development of machine tool capable to do both conventional and non-conventional (b) process control, (c) process development to achieve necessary accuracy and quality and (d) on-machine measurement and inspection. An integrated effort in these areas has resulted in successful fabrication of micro structures that is able to meet the miniaturization demands of the industry.
