E33 超薄肉X線望遠鏡基板の旋削加工について(OS-11 超精密加工(2))

抄録

An improvement of angular resolution is one of the most important problems in the development of high throughput X-ray telescope for future X-ray astronomy missions. We have developed a new method to make very thin mirror by diamond turning using special support structure made of water solvable UV-curing resin. One of a critical process to minimize the figure error is to control of internal strain. Using this method, we have made test conical mirrors with the diameter of 150 mm, the height of 100 mm, grazing angle of 0.6 degree and thickness of 0.3 mm. The mechanical design of this mirror and support structure, process of diamond machining including chucking and separation, and X-ray test for the mirror performance and their results are described.