抄録
A 5-axis simultaneous controlled machine tool is built up to machine the micro-scale structures on brittle materials in milling. The on-machine measuring system is developed to measure the alignment error in the setting of the workpiece and surface profile after machining. A confocal laser displacement sensor is mounted on the head of the machme tool in the measurement. The alignment error can be compensated by the coordinate transformation based on the measured data. The glass milling is performed to verify the error compensation with the developed measuring system. The machined profile can also be measured with the laser scanning on the surface.
