Abstract
Recently, many micro processes have been developed for fabricating various types of micro elements and systems. In this study, single point incremental forming, in which any die or any backing plate was needed, was developed for fabricating thin shell structures. It was found that the accurate sensing of contact between the tool and blank, and the selection of proper forming conditions resulted in the elongation of forming limit. Then, micro 3D shell structures of aluminum foil 12 micrometers thick were formed successfully on a blank without any die or any backing plate. Finally, incremental forming of miniature pyramid with a base of 1 mm x 1 mm was conducted on an ultra thin pure gold foil 2.5 micrometers thick.
