抄録
This study describes scanning probe microscope(SPM) analysis of cBN thin films with a magnetically enhanced plasma ion plating (MEP-IP) method. The structure of films was investigated by means of XRD. SPM was observed in the current mode. As a result, the current distribution of the film where cBN exists together had the difference of the contrast corresponding to the ruggedness on the surface, and, on the other hand, didn't had the difference of the contrast for the film where cBN is not included.