生産加工・工作機械部門講演会 : 生産と加工に関する学術講演会
Online ISSN : 2424-3094
セッションID: D40
会議情報
D40 切削工具用cBN膜のSPM測定(OS6 切削加工(4))
所 敏夫今田 琢巳野間 正男山下 満小川 圭二中川 平三郎
著者情報
会議録・要旨集 フリー

詳細
抄録
This study describes scanning probe microscope(SPM) analysis of cBN thin films with a magnetically enhanced plasma ion plating (MEP-IP) method. The structure of films was investigated by means of XRD. SPM was observed in the current mode. As a result, the current distribution of the film where cBN exists together had the difference of the contrast corresponding to the ruggedness on the surface, and, on the other hand, didn't had the difference of the contrast for the film where cBN is not included.
著者関連情報
© 2010 一般社団法人 日本機械学会
前の記事 次の記事
feedback
Top