C06 修正輪型研磨機における修正輪溝形状の影響(OS10 班磨技術(2))

抄録

In this research, we examined ring groove shape in conditioning ring type polishing machine for the purpose of reduction of amount of the slurry used. With a conditioning ring which has a wide variety of the shape, polishing experiment was conducted, and influence on the amount of polishing was compared. Moreover, we observed inside of conditioning ring with transparent polishing machine and relationship between when time progressed amount of slurry maintenance and ring groove shape was compared.