A12 Development of Grinding Machine for 450mm Wafer : 2^<nd> Report:Numerical Analysis of Static Stiffness and Load Capacity of Water Hydrostatic Table

Abstract

In order to develop a water hydrostatic bearing for rotary table of 450mm wafer grinding machine, fluid analysis around the bearing pad was conducted numerically by using ANSYS FLUENT. As a result, the relationship between bearing clearance and sustaining force for each flow rate was obtained. From the relations, load capacity and static stiffness were estimated. Then, the estimated results were compared with the experimental.