抄録
Electrical Discharge Machining (EDM) has been used in micro-fabrication because of its low reaction force. We proposed a new micro-pin forming method in which a rotating electrode scans towards a forming plate. As the processing area in this method is large, a higher removal rate is achieved compared to the WEDG method. And forming of the micro-pin of 8μm diameter and 250μm length is done easily by this method. The rotational speed of the micro-pin reached critical in the process of high aspect ratio of the micro-pin forming. We consider the micro-pin rotation effects on miniaturization limits. In this study, we investigate micro-pin forming method considering the natural vibration frequency of the electrode.
