抄録
In the present report, we focus on finishing of bottom surface on micro channel by magnetic polishing process with a ball-nose-shaped tool. The end milling and polishing processes were integrated with a desktop-sized machine tool. We investigated influences of polishing conditions on the amount of polishing, surface roughness, and mirror state for various groove shapes. Polishing condition for groove shape was determined based on experimental results on plane surface polishing. We implemented some experiments to evaluate influences of the condition on polishing effects of grooves. A proper polishing condition was derived from the experiments.