Abstract
This present study fabricates an array of micro-beams by transfer-print of Au thin-film on a micro-ridged substrate. The production yield of micro-beam is strongly affected by the surface properties of thin-film on the stamp. A hydrophobic surface of h-PDMS stamp allows Au thin-film to have surface asperities with tens nanometer in height, so that it enables the thin-film to be easily released from the stamp. Higher production yield of micro-beam can be achieved by transfer print of a multi-layered thin-film, which is composed by vapor-deposited Au and sputtered Cu and Al. A surface modification of Au thin-film, which is covered with 4-mercaptopropionic acid self-assembled monolayer, also improves the production yield of micro-beams fabricated by transfer-print because of an enhancement of adhesion force to the substrate.
