Abstract
A new fabrication method for realizing ordered nanopillar array is developed. In this method, firstly, a nanodot array is fabricated by combination of Nano Plastic Forming (NPF) and thermal dewetting, which does not involve costly and complicated processes such as EB-lithography. Then the Au-capped nanopillar arrays are produced by reactive ion etching (RIE). Finally, an Ag film is deposited on the nanopillar array. It is found the nanopillar arrays with Ag coating show good performance as a surface-enhanced Raman scattering (SERS)-active substrate.
