左右ボールネジカウンタバランス送り駆動系を有する工作機械の特性とマイクロドリル加工特性

抄録

Recently, the miniaturization and densification of the semiconductor package printed wiring boards (PWBs) have been demanded by the miniaturization and multi-functionalization of electronic equipment based on development of IT. For their realization, downsizing of PWBs’ micro-holes and fabrication of highly dense electrical circuit layers are also important. For high-speed and precision drilling, we proposed a feed driving system with a right and left coaxial ball screw as a counter balance structure. In this report, we investigated its dynamic characteristic with measuring the vibration. Furthermore, we examined the suitable weight of counter based on the result and application to machine tools.