超精密直動転がり案内テーブルにおけるMasing則に基づいた摩擦特性補償

抄録

Linear positioning table systems with rolling guide are employed by many mechanical systems. However, because it has nonlinear behavior due to the friction force in small load region, a construction of incorporating appropriate compensator control system is required. In this paper, the friction characteristics of rolling guides, that is expressed by a simple model based on Masing's rule, was incorporated in the positioning compensator.This compensation method inhibited the error due to the nonlinear behavior during driving and realized ultra-precision positioning with high tracking performance and practical use.