電界ラッピング技術における研磨砥粒挙動の基礎検討

抄録

Authors have been developed a novel lapping method using functional fluids which are dispersed abrasives with silicone oil. This fluid shows active reciprocate motion between electrodes under AC electric field at very low frequency. In this report, we studied the behavior of staying abrasives in the lapping area by using controlled slurry under AC electric field.