Abstract
In recent years, the miniaturization and densification of the semiconductor package printed wiring boards (PWBs) have been demanded by the miniaturization and multi-functionalization of electronic equipment based on development of IT. For their realization, downsizing of PWBs’ micro-holes and fabrication of highly dense electrical circuit layers are also important. For high-speed and precision drilling, we proposed a feed driving system withright and leftball screw as a counter balance structure.In a previous study, We solved the high-frequency vibration problem of servo systems1) . In this report, we clarified various vibration modes of machine tools by the finite element method. As a result, the effectiveness of the damping mechanism for the low frequency mode was confirmed.
