抄録
The properties of TiN films deposited by Arc Ion Plating (AIP) and Ion Beam Assisted Deposition (IBAD) method was studied to improve adhesion strength of the film. A cold work tool steel, SKD11, was used for a substrate. The substrates were coated with TiN by AIP and IBAD process. These coatings carried out at relatively low temperatures of approximately 773K. The microstructure and crystal orientation for the TiN coatings were investigated by Scanning electron microscope (SEM) and X-ray diffraction (XRD). Adhesions of the TiN coatings were evaluated using a Rockwell indentation tester. The TiN-IBAD coating had a mixed orientation of (111), (200), (220) and (222). The TiN-AIP coating with a very strong (111) orientation shows a high hardness.
