抄録
A new viscosity sensor enabling non-contact measurement at high speed, with less sample volume and high stability is required in a broad field. For example, in the industry field, process control by real time monitoring of viscosity can enhance quality and process yield of ink, paint and coating films. In this study, we have developed a new miniaturized optical viscosity sensor, namely MOVS, which measures viscosity by observing damping oscillation of laser-induced capillary wave (LiCW). MOVS consists of five U-grooves fabricated by MEMS process and optical fibers (photonic crystal fibers and fusion-spliced lensed fibers). The newly integrated optical surface tracking system makes possible the stable viscosity measurement under external disturbances. In this study, by integrating the optical surface tracking system, nanosecond damping oscillation of LiCW is successfully observed in the presence of high speed evaporation (1 micrometer per second) and external forced vibration.
