Abstract
In a multi-functional thermal analysis system, tiny cantilever type calorimeter and resonance mass measurement device will be located in a SEM, so that mass and thermal characteristics of small sample can be analyze with SEM observation. The developed cantilever type calorimeter has 420μm in length, 280μm in width. As a thermal function, it equips heater for heating sample, thermocouple for temperature measurement and thermopile for heat flow measurement. The calorimeter has features of low heat capacity, high thermal resistance and high integration of the devices using the MEMS technique. Therefore, a high speed temperature scan rate at more than 10,000K/s, and high sensitivity for nanogram sample are possible. Furthermore, the cantilever structure enables the mass measurement using mechanical resonance. This paper will report about the experiment of thermal analysis under SEM with the cantilever type calorimeter.
