Abstract
Micro-cantilever probe behaves as a van der Pol oscillator by linear-plus-nonlinear feedback control. The nonlinear dynamics of van der Pol-type self-excited micro-cantilever probe is investigated by considering atomic force between the tip of the probe and a sample surface. By applying the method of multiple scales to the equation of motion, we derive the amplitude equation expressing the slow time variation of the response amplitude. It is noticed from the nonlinear analysis that the response amplitude can be kept small by high-gain nonlinear feedback. The response frequency in the van der Pol-type self-excited micro-cantilever probe cannot be deviated from the effective natural frequency independent of the magnitude of amplitude response.
