MNM-2A-6 Model-Based Fluid-Simulation Method for Integrated Micro-Fluid Circuit

Abstract

Model-based simulation platform for integrated micro-fluid circuit was newly developed to calculate the complicated internal flow precisely and to optimize circuit configuration efficiently. It enables us to form simulation model easily and quickly through connecting blocks corresponding to fluid elements, and deals with transient, unsteady flow. The simulation platform predicts well static characteristics and dynamic response in micro-channel, and is now utilized to design new device-paper MEMS chip.