OS2-1-1 静電-弾性協働マイクロアクチュエータ用立体微小非線形板バネの製作プロセスの検討(OS2 三次元の微細形状創成技術(1))

抄録

Development of the micro actuator powered by collaboration of electrostatic and elastic energies, that is a kind of electrostatic micro actuator proposed previously and named EC-Macbee, is being continued. For increasing generated power of the actuator, the actuator having the electrodes parallel to the substrate was proposed. In order to realize this actuator, three-dimensional micro non-linear leaf spring is needed. In this study, the fabrication process of the non-linear leaf springs made of thick photoresist has been proposed, and the validity of the process has been examined. The fabricated non-linear leaf springs had non-uniform thickness, and were deformed and out of the designed shape. This problem could be greatly improved by utilizing two-step patterning of thick photoresist and long baking after patterning.