抄録
We have studied an adhesion type micro-manipulation tip using, meniscus force between an object and the tip. Previously studied heating type tip varies adhesion force between 13 μN to 0.6 μN level due to wet and dry state change by water supply from inner hole and evaporation by heating of over 130℃. To reduce the adhesion force reduction temperature, suction and heating operation method was studied. It was confirmed that the adhesion force reduction temperature was decreased by 75℃ by using suction of the water from rear end at the heating.
