Abstract
In order to realize spatial and temporal imaging of cellular functions of single living cells, we have been developing a newly designed probe for atomic force microscope (AFM), named "bioprobe", which is integrated with a hollow silicon dioxide (SiO_2) nanoneedle. By employing our newly developed process, bioprobes, which are fully integrated a fluidic microchannel embedded into a silicon (Si) cantilever beam structure, were successfully fabricated. We also proposed a novel intracellular delivery method based on electrokinetically driven flow. Preliminary ejection tests revealed the capability of handling an extremely small volume of liquid with good controllability.
