Abstract
Brain-Machine Interface (BMI), which is a system interacting between our brains and machines, can be applied in various ways such as communication tools for serious handicapped person, entertainment tools. We demonstrated the fabrication of polymer micro-needle electrodes that may be applicable as flexible electrodes in BMI. For this application, conductive layer of needle surface must be protected from peeling off during the insertion. Thus, we coated the electrodes with a nanoporous parylene film after a silver film was deposited. We experimentally verified when the amount of the parylene dimer was 75 mg, the conductive membrane was successfully protected while maintaining conductivity.
