The Proceedings of the Symposium on Micro-Nano Science and Technology
Online ISSN : 2432-9495
2013.5
Session ID : 5AM2-C-1
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5AM2-C-1 Development of Ferroelectric Dipole Electrets and its Application to Electrostatic Vibration Energy Harvester
Haruhiko AsanumaHiroyuki OguchiMotoaki HaraHiroki Kuwano
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Abstract
We propose a ferroelectric dipole electret (FDE) consisting of a polarized ferroelectric for output power enhancement in electrostatic vibration energy harvesters. Lead zirconate titanate (PZT) ceramics were employed to develop the FDEs. For comparison, a conventional electret was also prepared by implanting charges into a 10-μm thick CYTOP polymer by using point-to-grid corona discharging method. Output power was evaluated from a vertical-type capacitive energy harvester at acceleration 4.9 m/s^2, frequency 20 Hz, and initial air gap 0.36 mm. The maximum output power of FDE harvester is 8.6 μW, a 1.7-fold increase over a CYTOP polymer electret harvester. The FDE demonstrated the higher potential compared to the conventional polymer electret.
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© 2013 The Japan Society of Mechanical Engineers
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