マイクロ・ナノ工学シンポジウム
Online ISSN : 2432-9495
セッションID: 6PM1-A-4
会議情報
6PM1-A-4 MEMSデバイスによる多層カーボンナノチューブの層間すべり変形機構の解明(6PM1-A マイクロナノプロセス技術II(センサシンポジウムとの合同セッション))
山内 健司大森 英明磯野 吉正屋代 如月
著者情報
会議録・要旨集 フリー

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抄録
We have developed the in-situ scanning electron microscopy (SEM) nanomaterial manipulation system including newly designed Electrostatically Actuated NAnotensile Testing devices (EANATs), in order to investigate mechanical characteristics of multi-walled carbon nanotubes (MWCNTs) synthesized by an atmosphere pressure-chemical vapor deposition (APCVD). The new EANATs can measure uniaxial tensile displacement of nanomaterials with the capacitive displacement sensor incorporated to the cantilever motion amplification system. The nanomaterial manipulation system functions to pick up an individual MWCNT from a substrate and to fix it on EANATs. Stress-strain relations of MWCNTs were successfully obtained from the nanotensile tests, and Young's moduli were estimated to be 243 to 623 GPa. The shear strength at stick-slip event during interlayer sliding of MWCNTs under tensile loading was directly derived from the shear interaction force in tensile force-displacement curves and SEM observations.
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© 2013 一般社団法人 日本機械学会
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