Abstract
Diamond-Like Carbon (DLC) film is carbon-based hard thin film in amorphous state having an intermediate structure of graphite and diamond. DLC has excellent characteristics as a coating material such as high hardness, low friction, abrasion resistance, and chemical stability. Further, in recent years, with the development of nanotechnology, DLC film has been expected as a protective coating for a fine three-dimensional structure. So optimization of DLC film deposition technique to a fine three-dimensional structure are necessary. In the present study, DLC films were prepared using a bipolar-type plasma based ion implantation and deposition (bipolar PBII&D) system on the micro-scale trench patterns and uniformity of film thickness deposited on each trench surface was evaluated.
