抄録
An infrared hyper-spectral imager based on a piezoelectrically driven tunable Fabry-Perot filter and a two dimensional scanning detector for spectrum analysis has been developed. The Fabry-Perot filter consisting of two parallel ZnSe mirrors and a miniaturized movable stage actuated by a stacked piezoelectric actuator was fabricated. The measured transmittance of Fabry-Perot filter using a laser with wavelength of 1550 nm showed a good agreement with the theoretical value. In addition, interferogram of broadband source (hot water in quartz beaker) through Fabry-Perot filter was also obtained, which meets with the theoretical waveform. Furthermore, according to the comparison of conditions with or without a polyethylene film placed in the optical path, we find an absorption point whose corresponding gap distance is times to the half of released absorption band of polyethylene.
