Abstract
In this study, we have developed three-dimensional (3-D) piezoelectric micro power generation devices using a 3-D ceramics molding process based on microstereolithography. In experiments, we fabricated a piezoelectric spiral element, which can generate output voltage by applying multidirectional loads. The generated electrical power attained to 123 pW by applying the maximum load of 2.8 N at 2 Hz along the helical axis. However, the electrical power generation is insufficient to use for practical applications. To improve the electrical properties of spiral element, we tried to use a tow-step sintering process. As a result, piezoelectric constant d_<31> of the sintered body produced by the two-step sintering process attained to -40.0 pC/N that is better than that of a conventional sintered body. Moreover, we simulated the distribution of electrical potential of a spiral piezoelectric element. From the result, We found that the output voltage of the selective electrode was 30 times higher than that of uniform electrode.
