5PM3-PMN-011 Electrode Optimization for Electrostatic Energy Harvester with Consideration of Fringing Effect

Abstract

In this study, we report the optimization of electrode design for increasing output power of the vibration electrostatic energy harvesters. The output power depends on the capacitance change and its frequency. Without consideration for fringe effect of a parallel-plate capacitance, the narrower electrode pitch L is, the larger output power. However, under actual conditions, power output is limited by fringe effect. To consider fringe effect, the optimum electrode dimension changes due to the distance between the electret and counter electrode. By using FEM analysis with fringe effect, we find the characteristic of fringe effect at parallel-plate capacitor, and then the optimum width of counter electrode fFand electrode pitch L are obtained.